Roller nanoimprint apparatus, mold roller for use in roller nanoimprint apparatus, fixing roller for use in roller nanoimprint apparatus, and production method of nanoimprint sheet

ABSTRACT

The present invention provides a roller nanoimprint apparatus capable of preventing a workpiece film with nanostructures having been transferred from the mold roller from being uneven in thickness and allowing easy replacement of the mold roller. The present invention is a roller nanoimprint apparatus including a mold roller and continuously transferring nanosized protrusions to a surface of a workpiece filmby rotating the mold roller,
         wherein the mold roller is a cylindrical body, having an outer circumference surface with nanosized recesses formed thereon,   the roller nanoimprint apparatus further includes a fluid container having an elastic film inflatable by injecting fluid into the container, the fluid container being arranged in a region defined by an inner circumference surface of the mold roller,   the mold roller is mounted or demounted when the elastic film is shrunken, and   the mold roller is supported from the inside when the elastic film is inflated.

TECHNICAL FIELD

The present invention is directed to roller nanoimprint apparatuses,mold rollers for use in a roller nanoimprint apparatus, fixing rollersfor use in a roller nanoimprint apparatus, and production methods of ananoimprint sheet. More particularly, the present invention is directedto a roller nanoimprint apparatus, a mold roller for use in a rollernanoimprint apparatus, a fixing roller for use in a roller nanoimprintapparatus, and a production method of a nanoimprint sheet, suitable forproducing resin sheets with a low reflective surface.

BACKGROUND ART

Nanoimprint technology in which a resin material formed on a substrateis embossed with an undulated pattern in nanometer size (1 to 1000 μm)(hereinafter, also referred to as “nanostructure(s)”) of a mold bypressing the two together has attracted attention recently. Applicationsof nanoimprint technology to optical materials, finer ICs, substratesfor clinical laboratory test, and the like are now being developed andresearched. Nanoimprint technology advantageously allows a componentwith a variety of characteristics to be produced at low costs ascompared with conventional pattern-forming processes involvinglithography and etching. This is because nanoimprinters have a simpleconfiguration and are not so expensive than conventional apparatuses andfurther because it takes a short time to mass-produce components withthe same shape.

Thermal nanoimprint and UV nanoimprint are known as nanoimprinttechnology. According to UV nanoimprint, for example, a mold withnanostructures is pressed against a UV-curable resin film formed on atransparent substrate, and the film is irradiated with UV ray, therebyproducing a thin film with nanostructures in the inverse shape of themold on the transparent substrate. Flat molds and batch process arecommonly employed in UV nanoimprint, although it is still studied.

In order to mass-produce thin films with nanostructures at low costs bynanoimprint technology, roll-to-roll process is preferable to batchprocess. Roll-to-roll process allows continuous production of the thinfilm with nanostructures.

With respect to nanoimprint technology involving roll-to-roll process,for example, Patent Document 1 discloses that a pattern of a mold roller52 is transferred onto a UV-curable resin coated on a mold roller 51larger than the mold roller 52 while the pattern is extended bysequentially moving the mold roller 52 laterally as shown in FIG. 18.However, in this method, the mold roller 52 is moved, and so, theresulting film has a seam in the pattern. Thus this method is notsuitably used for forming a nanopattern with a width larger than thewidth of the mold roller 52.

With respect to rollers used in roll-to-roll process in technologiesother than nanoimprint technology, for example, Patent Documents 2 and 3disclose a method of producing a roller with an undulated patterndirectly formed thereon. When this method is applied to nanoimprinttechnology, however, a mold roller with nanostructures needs to beequipped with, for example, a bearing mechanism for coupling the moldroller with a nanoimprinter. This leads to an increase in costs on themold roller, which is a problem in view of mass-production.

Further, for example, Patent Document 4 discloses, in FIG. 7, a methodof attaching a cylindrical member with an undulated pattern to a roller.According to this method, however, it is difficult to form a continuousnanopattern by bending the member around the outer circumference of theroller, and as a result, the mold roller has a seam in the nanopattern.

In view of this, for example, Patent Documents 5 to 8 disclose, in atechnology of producing optical materials with nanostructures, a methodof using an aluminum substrate having a surface with nanosized cavitiesformed thereon by anodizing. In optical materials, “moth-eye structure(s)” is known as one type of the nanostructures. The moth-eye structuresinclude, for example, conical protrusions in nanometer size formed on atransparent substrate surface. According to optical materials with themoth-eye structures, a reflected light amount can be dramaticallydecreased because a refractive index continuously changes from an airlayer to a transparent substrate and so incident light does notrecognize the air layer-transparent substrate interface as an opticalsurface.

According to this method involving anodizing, for example, as disclosedin FIG. 19 of Patent Document 8, nanosized recesses can be formed in arandom placement and in a uniform distribution, and seamlessnanostructures needed for continuous production can be formed on acolumnar or cylindrical mold roller surface.

[Patent Document 1]

Japanese Kokai Publication No. 2007-203576

[Patent Document 2]

Japanese Kokai Publication No. 2005-144698

[Patent Document 3]

Japanese Kokai Publication No. 2005-161531

[Patent Document 4]

Japanese Kokai Publication No. 2007-281099

[Patent Document 5]

Japanese Kohyo Publication No. 2003-531962

[Patent Document 6]

Japanese Kokai Publication No. 2003-43203

[Patent Document 7]

Japanese Kokai Publication No. 2005-156695

[Patent Document 8]

WO 2006/059686

[Patent Document 9]

Japanese Kokai Publication No. 2001-264520

DISCLOSURE OF INVENTION

Mold rollers in nanoimprinters can not be permanently used and need tobe replaced after being used for a certain period. So the mold rollersare strongly desired to be not expensive. Cylindrical mold rollershaving a simple structure are effectively used as such replaceable moldrollers. In addition, the mold roller needs to impart the nanostructureswhile applying a uniform pressure to a workpiece film surface in orderto prevent the resulting film from being uneven in thickness. When acylindrical mold roller is used, needed is a method, of mounting thecylindrical mold roller on a nanoimprint apparatus with high accuracycontrol of position and direction of the mold roller. According tomounting mechanisms, e.g., screws such as a bolt, fastening jigs such asa sprocket, and a spacer, it is difficult to mount the mold roller on ananoimprint apparatus in an easy replaceable manner and with highaccuracy control of the position and direction of the roller.

The present invention has been made in view of the above-mentioned stateof the art. The present invention has an object to provide a rollernanoimprint apparatus, a mold roller for use in a roller nanoimprintapparatus, a fixing roller for use in a roller nanoimprint apparatus,and a production method of a nanoimprint sheet, in which the resultingfilm with nanostructures which have been transferred from the moldroller are prevented from being uneven in thickness.

The present inventors made various investigations on a rollernanoimprint apparatus including a cylindrical mold roller, and noted away of mounting the mold roller on the nanoimprint apparatus. Further,the inventors found the followings. An elastic film inflatable by fluidis used, and the mold roller is mounted or demounted when the elasticfilm is shrunken, and the mold roller is supported from the inside whenthe elastic film is inflated. According to this, the resulting film withnanostructures having been transferred from the mold roller can beprevented from being uneven in thickness, and the mold roller can beeasily replaced. As a result, the above-mentioned problems have beenadmirably solved, leading to completion of the present invention.

The present invention is a roller nanoimprint apparatus including a moldroller and continuously transferring nanosized protrusions to a surfaceof a workpiece film by rotating the mold roller,

wherein the mold roller is a cylindrical body having an outercircumference surface with nanosized recesses formed thereon,

the roller nanoimprint apparatus further includes a fluid containerhaving an elastic film inflatable by injecting fluid into the container,the fluid container being arranged in a region defined by an innercircumference surface of the mold roller,

the mold roller is mounted or demounted when the elastic film isshrunken, and

the mold roller is supported from the inside when the elastic film isinflated (hereinafter, also referred to as a “first nanoimprinter of thepresent invention”).

In the present invention, by rotating the cylindrical mold roller anouter circumference surface of which has nanosized recesses formedthereon, embossment to a workpiece film and separation from the film canbe continuously performed. As a result, a product having a surface withnanosized protrusions formed thereon can be mass-produced at fastspeeds. Further, by rotating the cylindrical mold roller, the resultingfilm can be provided with seamless surface shape.

The workpiece film is not especially limited as long as nanosizedprotrusions in the inverse shape of the nanosized recesses formed on theouter circumference surface of the mold roller can be formed on theworkpiece film by embossment. For example, a sheet resin is preferablyused as the film. In embossment to resins, it is preferable that anuncured or half-cured resin is embossed with the mold pattern and thenprovided with curing treatment.

In the present description, the nanosized recesses are intended to referto recesses each having a depth of 1 nm or larger and smaller than 1 μm(=1000 nm), and the nanosized protrusions are intended to refer toprotrusions each having a height of 1 nm or larger and smaller than 1 μm(=1000 nm). In the present description, the shaped structures, i.e.,nanosized recesses and nanosized protrusions are also referred to asnanostructure (s). Examples of the nanostructures include moth-eyestructures and wire grid structures.

The first nanoimprinter of the present invention includes a fluidcontainer in a region defined by an inner circumference surface of themold roller, the fluid container having an elastic film inflatable byinjecting fluid into the container. The fluid container is notespecially limited as long as it has a structure allowing the elasticfilm to be inflated by fluid injected thereinto. For example, the fluidcontainer may be a bag-like elastic film or a rigid container with anopening sealed with an elastic film. Use of such a fluid containerallows the mold roller to be mounted or demounted when the elastic filmis shrunken and to be held from the inside when the elastic film isinflated. Further, by applying fluid pressure uniformly to the innercircumference surface of the mold roller, the mold roller can besupported, and as a result, a workpiece film having a uniform thicknesscan be obtained. The elastic film is shrunken by discharging the fluidfrom the fluid container, and the mold roller can be mounted ordemounted. This allows easy replacement of the mold roller.

The first roller nanoimprint apparatus of the present invention is notespecially limited and may include other components as long as itincludes the mold roller and the fluid container.

According to preferable embodiments of the first nanoimprinter of thepresent invention,

(1) the first imprinter includes a hollow roller removably mountedthereon in the region defined by the inner circumference surface of themold roller, the hollow roller having an opening,

wherein the elastic film is a bag-like elastic film,

the fluid container is an elastic bag composed of the elastic film,

the elastic bag is arranged inside the hollow roller,

the mold roller is supported by inflating the elastic bag, therebybringing a portion of the elastic bag, protruded from the opening of thehollow roller by the inflation, into contact with the innercircumference surface of the mold roller, and

when thus-supported, the mold roller is rotated by rotating the hollowroller;

(2) the fluid container is removably mounted thereon and seals anopening of a hollow roller with the elastic film,

the mold roller is supported by inflating the elastic film, therebybringing the elastic film into contact with the inner circumferencesurface of the mold roller, and

when thus-supported, themold roller is rotatedby rotating the hollowroller; and

(3) the first nanoimprinter includes a rotor removably mounted thereonin the region defined by the inner circumference surface of the moldroller,

wherein the elastic film is a bag-like elastic film,

the fluid container is an elastic bag composed of the elastic film andis mounted around the rotor,

the mold roller is supported by inflating the elastic film, therebybringing the elastic film into contact with the inner circumferencesurface of the mold roller, and

when thus-supported, the mold roller is rotatedby rotating the rotor.

In the embodiments (1) and (2), according to a preferable embodiment ofthe hollow roller, an elastic body is arranged on a surface of thehollow roller facing the inner circumference surface of the mold roller,except for in the opening. According to this embodiment, if the moldroller contacts the hollow roller, the elastic body functions as abuffer to prevent the resulting film from being uneven in thickness andprotect the hollow roller and the mold roller against damages.

It is preferable that the hollow roller has a plurality of the openingsin order to stably support the mold roller. The openings preferably aresubstantially the same in size and also preferably substantiallyuniformly spaced.

In the embodiment (3), according to a preferable embodiment of therotor, an elastic body is arranged on an outer circumference surface ofthe rotor in an elastic bag-free region. According to this embodiment,even if the mold roller contacts the rotor, the elastic body functionsas a buffer to prevent the resulting film from being uneven in thicknessand protect the rotor and the mold roller against damages.

According to a preferable embodiment of the mold roller, the mold rollersubstantially has no seam. According to this embodiment, the mold rollerhas a seamless pattern of the nanosized recesses on its outercircumference surface. This allows the workpiece film to have asubstantially seamless pattern of the nanosized protrusions. Forexample, a display device including this film as an ultra-low reflectionfilm can prevent occurring of uneven display. The term “seamless” (thephrase “substantially has no seam”) is intended to refer to a statewhere a seam can not be optically observed. It is preferable that theouter circumference surface of the mold roller has a difference insurface height, which is linearly formed, of 0.6 μm or smaller. It isalso preferable that a pattern-free linear region with larger than 0.6μm in width is not formed on the outer circumference surface of the moldroller. The mold roller with the substantially seamless pattern can beobtained by directly forming a mold pattern on an outer circumferencesurface of a cylindrical roller member. In contrast, when a plate memberwith a previously formed mold pattern is bended to joint the both endsthereof to each other, the resulting mold roller has a seam portion.

According to a preferable embodiment of the mold roller, the mold rolleris an aluminum tube having the nanosized recesses formed on a polishedouter circumference surface thereof by anodization. According to thisembodiment, the mold roller with substantially no seam can be obtained,and the above-mentioned advantages can be obtained. The polishing ispreferably performed by cut-polishing. As a way of cut-polishing thealuminum tube surface, an aluminum tube is continuously cut-polishedwith a tool bit made of diamond while being rotated by moving the toolin a direction of a rotation axis of the tube. The mold roller obtainedfrom the thus-polished aluminum tube has a surface with a linear scar.The linear scar is small enough not to be observed with the naked eye,and it can be determined by observing the surface with scanning election microscope (SEM). According to anodization, nanosized conicalrecesses can be formed on the outer circumference surface of thealuminum tube. Such recesses can be exclusively formed by use ofanodization. By chemical oxidization, an oxide film with a flat surfaceis formed.

The present invention is also directed to a mold roller preferably usedin the first nanoimprinter of the present invention.

A first mold roller of the present invention is a mold roller for use ina roller nanoimprint apparatus, for continuously transferring nanosizedprotrusions to a surface of a workpiece film surface by embossing to theworkpiece film surface while being rotated,

wherein the mold roller is a cylindrical body having an outercircumference surface with nanosized recesses formed thereon, and

the mold roller includes a positioning mechanism for positioning themold roller with a member arranged in a region defined by an innercircumference surface of the mold roller. Examples of the positioningmechanism include an engagement structure and a hook. According to thefirst mold roller of the present invention, the positioning mechanismpositions the mold roller. This allows easy mounting or demounting ofthe mold roller and prevents sliding and misalignment of the mold rollerat the time of the embossing.

A second mold roller of the present invention is a mold roller for usein a roller nanoimprint apparatus, for continuously transferringnanosized protrusions to a surface of a workpiece film by embossing tothe workpiece film surface while being rotated,

wherein the mold roller is prepared by cut-polishing an outercircumference surface of a cylindrical aluminumtube formed by extruding,and alternately repeating etching and anodization for the cut-polishedouter circumference surface, thereby forming conical recesses with adepth smaller than a wavelength of visible light on the outercircumference of the mold roller. Extrusion is preferably employed forproducing the cylindrical aluminum tube, but the thus-produced aluminumtube might have a rough surface, and the roughness might be in a sizelarger than nanometer size. In contrast, by cut-polishing an aluminumtube surface prior to the anodization, the surface flatness of thealuminum tube can be ensured after the anodization. This can prevent theresulting film from having a roughness in a size larger than nanometersize, and so a phenomenon in which white blur on the film surface,caused by scattering of ambient light, can be suppressed. For example, adisplay device including this film as an ultra-low reflection film canprevent occurring of uneven display. When cut-polishing is employed, thealuminum tube surface possibly has a striation along the circumferentialdirection. When extrusion is employed, the surface possibly has astriation along the stretching direction of the tube. Thus, thestriation by cut-polishing and that by extrusion can be distinguished.Further, processes are rarely subjected to the inner circumferencesurface of the tube, and a striation by extrusion tends to remain on theinner circumference surface of the tube.

The present invention is also directed to a fixing roller preferablyused in the first nanoimprinter of the present invention.

A first fixing roller of the present invention is a fixing roller foruse in a roller nanoimprint apparatus, for continuously transferringnanosized protrusions to a surface of a workpiece film by rotating acylindrical mold roller having nanosized recesses formed on an outercircumference surface thereof,

wherein the fixing roller is arranged in a region (inside the moldroller) defined by an inner circumference surface of the mold roller,

the fixing roller includes an elastic film inflatable by fluidinjection,

the mold roller is mounted or demounted when the elastic film isshrunken, and

the mold roller is rotated by rotating the fixing roller when the moldroller is supported from the inside by inflating the elastic film, and

the fixing roller includes a positioning mechanism for positioning thefixing roller with the mold roller. Examples of the positioningmechanism include an engagement structure and a hook. According to thefirst fixing roller of the present invention, the mold roller can bepositioned due to the positioning mechanism. This allows easy mountingand demounting of the mold roller, and prevents sliding and misalignmentof the mold roller at the time of the embossing.

A second fixing roller of the present invention is a fixing roller foruse in a roller nanoimprint apparatus, for continuously transferringnanosized protrusions to a surface of a workpiece film by rotating acylindrical mold roller having nanosized recesses formed on an outercircumference surface thereof,

wherein the fixing roller is arranged in a region defined by an innercircumference surface of the mold roller,

the fixing roller includes an elastic film inflatable by fluidinjection,

the mold roller is mounted or demounted when the elastic film isshrunken, and

the mold roller is rotated by rotating the fixing roller when the moldroller is supported from the inside by inflating the elastic film, and

the fixing roller includes bearings. The second fixing roller includethe bearings, and so when being moved to an improper position on impactand the like, the mold roller can be rotated under no power supplythrough the fixing roller, and back to the proper position as quickly aspossible. Further, the use of the bearings can prevent misalignmentbetween the mold roller and the fixing roller in the rotation axisdirection.

According to the fixing roller for use in the roller nanoimprintapparatus of the present invention, the elastic film may be a componentof the fixing roller or may be a component independent form the fixingroller.

The present invention is also preferably a method of producing ananoimprint sheet using the first nanoimprinter of the presentinvention, specifically, a production method of a nanoimprint sheethaving nanosized protrusions formed on a surface thereof,

wherein a cylindrical mold roller and a fluid container are used, thecylindrical mold roller having nanosized recesses formed on an outercircumference surface thereof,

the fluid container arranged in a region defined by an innercircumference surface of the mold roller and including an elastic filminflatable by fluid injected into the container,

the mold roller is mounted or demounted when the elastic film isshrunken,

the mold roller is supported from the inside when the elastic film isinflated, and

embossing to a workpiece film is continuously performed by rotating themold roller (hereinafter, also referred to as a first sheet productionmethod of the present invention). According to the first sheetproduction method of the present invention, a nanoimprint sheet with auniform thickness can be produced at low costs. The nanoimprint sheet isnot especially limited as long as it has a surface with nanosizedprotrusions formed thereon, and a resin sheet is preferable, forexample. The nanoimprint sheet can be preferably used as ananti-reflection film, for example. This production method may be amethod in which embossing to the nanoimprint sheet is continuouslyperformed by rotating the mold roller.

The inventors also found that the resulting film with nanostructureshaving been transferred from the mold roller can be prevented from beinguneven in thickness and the mold roller can be easily replaced when themold roller is rotated while being supported by at least three pinchrollers (supporting rollers) that are arranged substantiallyrotation-symmetrically with respect to the rotation center (rotationaxis) of the mold roller. The present invention is also a rollernanoimprint apparatus continuously transferring nanosizedprotrusions toa surface of a workpiece filmby rotating a mold roller,

wherein the mold roller is a cylindrical body having nanosized recessesformed on an outer circumference surface thereof, and

the nanoimprint apparatus is configured to rotate the mold roller whilesupporting the mold roller by at least three pinch rollers arrangedsubstantially rotation-symmetrically with respect to a rotation centerof the mold roller (hereinafter, also referred to as a secondnanoimprinter of the present invention). The second nanoimprinterexcludes a fixing roller, and so the mold roller can be easily replaced.

According to the second nanoimprinter of the present invention, thepinch rollers are rotated while each holding the workpiece film frombothsides (both maj or surface sides) thereof together with the mold rollerby a certain pressure, thereby rotating the mold roller to push theworkpiece film forward. Thus, by arranging at least three pinch rollerssubstantially rotation-symmetrically, the mold roller can be stablysupported by only the pitch rollers.

Similarly to the first nanoimprinter of the present invention, in thesecond nanoimprinter of the present invention, it is preferable that themold roller substantially has no seam. It is also referable that themold roller is an aluminum tube having the nanosized recesses formed ona polished outer circumference surface thereof by anodization.

The second mold roller of the present invention and the second fixingroller of the present invention are preferably used in the secondnanoimprinter of the present invention.

The present invention is also directed to a production method of ananoimprint sheet using the second nanoimprinter of the presentinvention. One aspect of the present invention is to provide aproduction method of a nanoimprint sheet having nanosized protrusionsformed on a surface thereof,

wherein a cylindrical mold roller and at least three pinch rollers areused, the cylindrical mold roller having nanosized recesses formed on anouter circumference surface thereof, the at least three pinch rollersarranged substantially rotation-symmetrically with respect to a rotationcenter of the mold roller,

the mold roller is supported by the at least three pinch rollers, and

embossing to a workpiece film is continuously performed by rotating themold roller and the at least three pinch rollers (hereinafter, alsoreferred to as a second sheet production method of the presentinvention). According to the second sheet production method of thepresent invention, a nanoimprint sheet with a uniform thickness can beproduced at low costs. This production method may be a method in whichembossing to the nanoimprint sheet is continuously performed while themold roller and the at least three pinch rollers are rotated.

EFFECT OF THE INVENTION

According to the roller nanoimprint apparatus of the present invention,it is possible to prevent a workpiece film with nanostructures havingbeen transferred from the mold roller from being uneven in thickness,and the mold roller can be easily replaced.

BEST MODES FOR CARRYING OUT THE INVENTION

The present invention is mentioned in more detail below with referenceto Embodiments, but not limited only thereto.

Embodiment 1

FIG. 1 is an explanation view for showing the entire configuration of aroller nanoimprint apparatus of Embodiment 1.

According to the roller nanoimprint apparatus of Embodiment 1, first, abase film roll 11 is rotated to feed a belt-like base film 12 in thedirection shown by the arrow in FIG. 1. Then the base film 12 passesthrough a pair of pinch rollers 13 a and 13 b for tension adjustment andthen, an uncured resin is coated thereon by a die coater 14. The basefilm 12 moves halfway around a cylindrical mold roller 15 along itsouter circumference surface. At this time, the resin on the base film 12is in contact with the outer circumference surface of the mold roller15.

The material of the base film 12 is not especially limited, and examplesthereof include triacetyl cellulose (TAC) and polyethylene terephthalate(PET). The resin is preferably a resin curable by energy beam, e.g.,electromagnetic waves such as UV rays and visible light. A UV-curableresin is used in the present Embodiment.

The mold roller 15 is a cylindrical body having an outer circumferencesurface on which a plurality of cavities with a substantially conicalshape with about 200 nm in depth (the bottom of the cone is on analuminum surface side) is formed. The cylindrical body has 250 mm ininner diameter, 260 mm in outer diameter, and 400 mm in length. Such amold roller 15 can be prepared by cut-polishing an outer circumferencesurface of a cylindrical aluminum tube formed by extruding, andalternately repeating three times etching and anodization for thecut-polished flat (outer circumference) surface. The mold roller 15 hasseamless nanostructures because the etching and the anodization aresimultaneously performed for the outer circumference of the tube. Thusthe seamless nanostructures can be continuously imprinted into theUV-curable resin.

A cylindrical pinch roller 16 is arranged to face the outercircumference surface of the mold roller 15 at the position where thebase film 12 is firstly in contact with the outer circumference surfaceof the mold roller 15. At this position, the pinch roller 16 presses theUV-curable resin against the mold roller 15, and as a result, theUV-curable resin is embossed with the surface shape of the mold roller15. The base film 12 has a width smaller than the length of the rollers15 and 16 so that the rollers 15 and 16 uniformly sandwich the base film12. The pinch roller 16 is a rubber roller.

While the base film 12 travels along the outer circumference surface ofthe mold roller 15, the resin is irradiated with UV rays from the bottomside of the roller 15. As a result, cured is the UV-curable resin havinga surface with nanosized protrusions and recesses in the inverse shapeto the surface shape of the mold roller 15. The white arrow in FIG. 1 isa direction of the UV-irradiation.

After moving halfway along the outer circumference surface of the moldroller 15, the base film 12 moves along a pinch roller 17 arranged toface the outer circumference surface of the mold roller 15 and then isseparated from the roller 15 together with the cured resin. Then, apinch roller 20 attaches a lamination film 19 fed from a lamination filmroll 18 to the resin film side-surface of the base film 12. Finally, alamination composed of the base film 12, the cured film with thenanostructures, and the lamination film 19 is rolled up to obtain alamination roll 21. The lamination film 19 can protect the resin filmsurface against dust and damages.

The resin film (workpiece film) 31 of the thus-obtained lamination roll21 has a surface on which substantially conical protrusions 32 withabout 200 nm in height are formed so that a distance between peaks ofadjacent ones of the protrusions is about 200 nm as shown in FIG. 2. Thesurface structures are commonly called “moth-eye structure(s)”. Filmswith moth-eye structures are known as ultra-low reflective films havinga reflectance for visible light of about 0.15%, for example. Themoth-eye structures are protrusions smaller than a wavelength of visiblelight (380 nm to 780 nm), and due to these protrusions, the refractiveindex of the interface is considered to continuously and graduallyincrease from 1.0 of the refractive index of air on the film surface toa value equivalent to the reflective index of the film material (1.5 inthe resin film 31). As a result, no refractive-index interfacesubstantially exists, and the reflectance on the film interface issharply decreased.

The mold roller 15 shown in FIG. 4( a) is mounted on the nanoimprintapparatus with a metal fixing roller 151 and a rubber balloon 156 shownin FIG. 4( b). According to the present Embodiment, the mold is preparedby forming nanostructures on a metal tube surface, and so the mold witha simple structure can be produced at low costs, as compared with thecase where a metal column directly mounted on the nanoimprint apparatusis used as the mold. Mirrored aluminum tubes produced by high-accuratelycutting a surface of a cylindrical aluminum tube prepared by extrusionare available as the polished aluminum tube at low costs. The moldroller 15 is removably fixed to the fixing roller 151, and this allowsreplacement and maintenance of only the mold roller 15, leading to areduction in running costs of the nanoimprint apparatus.

FIG. 5 is a perspective view schematically showing a state where thefixing roller has been arranged inside the mold roller tube. FIG. 6 is across-sectional view schematically showing a state where the fixingroller has been arranged inside the mold roller (when the mold roller ismounted or demounted). FIG. 7 is a cross-sectional view schematicallyshowing a state where the fixing roller has been arranged inside themold roller tube (when the mold roller is fixed to the fixing roller).The fixing roller 151 is composed of a hollow body 151 a including therubber balloon 156 thereinside and a shaft 151 b extending from therespective ends of the body 151 a. The body 151 a has a cylindricalshape and the both ends thereof are constituted by a wall surface. Thebody 151 a has openings each extending in the rotation axis direction ofthe fixing roller 151, i.e., in parallel to the extending direction ofthe shaft 151 b. The openings of the body 151 a are preferably arrangedin parallel to the rotation axis direction of the fixing roller 151 sothat a uniform pressure is given to the resin. From the same reason, itis also preferable that the openings are the same in size and uniformlyspaced. It is preferable that the openings do not have an angular shapeso as to avoid damages against the rubber balloon 156. The hollow body151 a has 246 mm in outer diameter and 400 mm in length. The shaft 151 bis inserted into a shaft-mounting portion of the nanoimprint apparatus.The fixing roller 151 can be rotated around the extending direction ofthe shaft 151 b by power supplied through the shaft-mounting portion.

The rubber balloon 156, which is arranged inside the body 151 a of thefixing roller 151, fixes the mold roller 15. The cylindrical mold roller15 cover the body 151 a of the fixing roller 151 by inserting the fixingroller 151 thereinto. When this mold roller 15 is mounted, the rubberballoon 156 is shrunken as shown in FIG. 6. Similarly, also when themold roller 15 is demounted, the rubber balloon 156 is shrunken. Forfixing the mold roller 15, fluid is injected through a pressure port 256into the rubber balloon 156, and as shown in FIG. 7, the rubber balloon156 is inflated until it protrudes from the openings of the body 151 aof the fixing roller 151 to be pressed against the inner circumferencesurface of the mold roller 15. In the present Embodiment, the fixingroller 151 is a hollow roller, and the rubber balloon 156 is an elasticbag. Examples of the fluid for inflating the rubber balloon 156 includegases such as air, and liquids such as water.

The pressure port 256 has a symmetrical shape with respect to therotation axis in order to give a uniform pressure to the mold roller 15.It is preferable that the pressure port 256 is arranged near therotation axis or a plurality of the pressure ports 256 are arrangedsymmetrically with respect to the rotation axis in order to give auniform pressure to the mold roller 15.

According to the fixing way of the mold roller 15 of the presentinvention, the fluid inside the rubber balloon 156 uniformly applies apressure to the inner circumference surface of the mold roller 15. Sowhen the base film 12 with being sandwiched between the mold roller 15and the pinch roller 16 is embossed with the nanostructures, the resinon the base film 12 can be uniformly pressed, and as a result, uneventhickness of the resin film 31 can be prevented. The thickness of theresin film 31 prepared in the present Embodiment was measured to be10±0.7 μm, which shows the resin film 31 has excellent in thicknessuniformity. The resulting resin film 31 was attached on a flat surfaceof a black acrylic plate (refractive index: 1.49) with a paste(refractive index: 1.50). This film was observed by the naked eye fromvarious directions under white light. Neither thickness unevenness noraccompanying display unevenness was determined. Such a resin film 31 ispreferably attached, as an anti-reflection film, to display screens ofdisplay devices, display windows such as show windows, or decoratedsurfaces of building materials. Examples of the display devices includeLCDs, organic EL displays, and plasma displays.

According to this way of fixing the mold roller 15 of the presentEmbodiment, the mold roller 15 can be easily fixed by the fluidinjection and also can be easily released by the fluid discharge.

According to the present Embodiment, as shown in FIG. 8, a rubber plate251, which is an elastic body, may be attached to the outercircumference surface of the body 151 a of the fixing roller 151, exceptfor in the openings. The rubber plate 251 functions as a stopper(buffer) for preventing contact between the fixing roller 151 and themold roller 15. Owing to the rubber plate 251, the contact between thefixing roller 151 and the mold roller 15 can be prevented when thenanostructures are transferred. As a result, the resin film 31 can showa uniform thickness and the fixing roller 151 and the mold roller 15 canbe protected against damages. The rubber plate 251 has a thickness of0.5 mm, for example. The rubber plate 251 may be arranged on the innercircumference surface of the mold roller 15 or on the rubber balloon 156surface at the portions protruding from the outer circumference surfaceof the body 151 a of the fixing roller 151 although being arranged onthe outer circumference surface of the body 151 a of the fixing roller151 in this Embodiment. The elastic body is not especially limited aslong as it can reduce impacts. Springs may be used instead of the rubberplate 251.

The following configuration shown in FIG. 9 may be employed. Linearprojections 151 c are formed on an outer circumference surface of thebody of the fixing roller 151 and further linear grooves 15 c are formedon the inner circumference surface of the mold roller 15 so that thelocation of the projections 151 c corresponds to the location of thegrooves 15 c when the fixing roller 151 is arranged inside the moldroller 15. The linear projections 151 c are high enough to engage withthe linear grooves 15 c with a space therebetween when the fixing roller151 is arranged inside the mold roller 15. When the mold roller 15 isfixed to the fixing roller 151, the projections 151 c and the grooves 15c are loosely engaged with each other, and thereby the mold roller 15can be roughly positioned with the fixing roller 151. Then, by inflatingthe rubber balloon 156, the fixing roller 151 can support the moldroller 15 with high accuracy. Thus, for example, when a large resin film31 is produced using a large mold roller 15 with 1 meter or larger of alength in the rotation axis direction, the mold roller 15 can be easilymounted or demounted.

According to the example shown in FIG. 9( a), four linear projections151 c are formed on the outer circumference surface of the body of thefixing roller 151. According to the example shown in FIG. 9( b), fourlinear grooves 15 c are formed on the inner circumference surface of themold roller 15. The number of the engaged structures each composed of apair of the projection 151 c and the groove 15 c is not especiallylimited.

The shape and location of the engaged structures are not especiallylimited. As shown in FIG. 9, the linear projections 151 c and the lineargrooves 15 c extending in the rotating axis directions of the rollers 15and 151 respectively may be arranged only at the end of the rollers.Alternatively, linear projections and linear grooves extending from oneend to the other of the rollers 15 and 151 respectively may be arranged.The linear projections 151 c and the linear grooves 15 c in FIG. 9 canprevent sliding possibly occurring between the two rollers 15 and 151 inthe circumferential direction (rotating direction). The engagedstructures extending in the circumferential direction of the rollers canprevent misalignment between the rollers in the rotation axis direction.Further, when the engaged structures are composed of planar patternsextending both in the rotation axis direction and in the circumferentialdirection of the rollers, the sliding in the circumferential directionof the rollers, and the misalignment between the rollers in the rotationaxis direction can be both prevented.

The engaged structures may be composed of linear grooves formed on theouter circumference surface of the fixing roller 151 and linearprojections formed on the inner circumference surface of the mold roller15. Instead of the engaged structures composed of pairs of linearprojections and linear grooves, engaged structures composed of three ormore linear projections may be employed. For example, used may be anembodiment in which two linear projections parallel to each other areformed on the outer circumference surface of the fixing roller 151 andone linear projection is formed on the inner circumference surface ofthe mold roller 15, and the linear projection on the mold roller 15 ispositioned between the two projections on the fixing roller 151.

As shown in FIG. 10, the shaft of the fixing roller 151 may be equippedwith bearings 151 d. The bearings 151 d allow the mold roller 15, whichis compulsorily rotated by power of the nanoimprint apparatus normally,to be freely rotated (under no power supply through the fixing roller151) when the mold roller 15 is shifted from the proper position byimpacts and the like. As a result, the mold roller 15 can be back to theproper position as quickly as possible.

Embodiment 2

FIG. 11 is a cross-sectional view schematically showing a state where afixing roller has been arranged inside a mold roller tube (when the moldroller is mounted or demounted). FIG. 12 is a cross-sectional viewschematically showing a state where a fixing roller has been arrangedinside the mold roller tube (when the mold roller is fixed). The rollernanoimprint apparatus of Embodiment 2 has the same structure as in theroller nanoimprint apparatus of Embodiment 1, except for the fixingroller. According to a fixing roller 152 of the present Embodiment,openings of a hollow body 152 a are sealed with a rubber plate (rubbersheet) 157, and thus the whole of the inside of the body 152 a of thefixing roller 152 constitutes a fluid container. Specifically, accordingto the present Embodiment, the fixing roller 152 is a hollow roller, andthe rubber plate 157 is an elastic film. According to this Embodiment,the fixing roller 152 itself is used as a container for pressurization,and so a pressure port 257 is directly provided for the fixing roller tobe directly connected to a fluid injection portion of the rollernanoimprint apparatus. As a result, the strength of the fluid passageitself and the connection portion can be increased. A specific structureof the fixing roller of the present Embodiment is mentioned below.

The fixing roller 152 of the present Embodiment is composed of a hollowbody 152 a and a shaft 152 b extending from the respective ends of thebody 152 a. The body 152 a is a cylindrical body and the both endsthereof are composed of a wall face. The body 152 a has openings eachextending in the rotation axis direction of the fixing roller 152, i.e.,in parallel to the extending direction of the shaft 152 b. According tothe present Embodiment, the openings of the body 152 a are sealed with arubber plate 157. The openings of the fixing roller 152 are preferablyformed in parallel to the rotation axis direction of the fixing roller152 so as to give a uniform pressure against the resin. For the samereason, the openings are the same in size and uniformly spaced. The body152 a has 246 mm in an outer diameter and has 400 mm in a length. Theshaft 152 b is inserted into a shaft-mounting portion of the nanoimprintapparatus. The fixing roller 152 can be rotated round the extendingdirection of the shaft 152 b by power supplied through theshaft-mounting portion.

The rubber plate 157 sealing the openings of the body 152 a is arrangedto fix the mold roller 15. The cylindrical mold roller 15 covers thebody 152 a of the fixing roller 152 by inserting the fixing roller 152thereinto, as shown in FIG. 11. For fixing the mold roller 15, fluid isinjected through a pressure port 257 into the mold roller 15, and asshown in FIG. 12, the rubber plate 257 is inflated until it protrudesfrom the openings of the body 152 a of the fixing roller 152 to bepressed against the inner circumference surface of the mold roller 15.Examples of the fluid injected into the fixing roller 152 include gasessuch as air, and liquids such as water.

According to the fixing way of the mold roller 15 of the presentinvention, a uniform pressure is given by fluid to the innercircumference surface of the mold roller 15 through the rubber plate157. So when the base film 12 with being sandwiched between the moldroller 15 and the pinch roller 16 is embossed with the nanostructures,the resin on the base film 12 can be uniformly pressed, and as a result,a variation in thickness of the resin film 31 can be prevented. Thethickness of the resin film 31 prepared in the present Embodiment wasmeasured to be 10±0.2 μm, which shows the resin film 31 has excellent inthickness uniformity. The resin film 31 was observed similarly toEmbodiment 1, and neither thickness unevenness nor accompanying displayunevenness was determined.

According to this way of fixing the mold roller 15 of the presentEmbodiment, the mold roller 15 can be easily fixed by the fluidinjection and also can be easily released by the fluid discharge.

According to the present Embodiment, the rubber plate 157 is attached tothe inner circumference surface of the fixing roller 152. Thisembodiment is advantageous in terms of bonding strength as compared withthe embodiment where the rubber plate 157 is attached to the outer faceside of the fixing roller 152. According to the present Embodiment, arubber plate may be attached to the outer circumference surface of thebody 152 a of the fixing roller 152 as a stopper for preventing contactbetween the fixing roller 152 and the mold roller 15. In this case, thisrubber plate as the stopper (buffer) and the rubber plate 157 arrangedfor supporting the mold roller 15 may be integrated with each other.

Embodiment 3

FIG. 13 is a perspective view schematically showing a structure of afixing roller of Embodiment 3.

A fixing roller 153 of the present Embodiment includes a body on whichcircular openings with the same size are uniformly spaced. According tothe present Embodiment, a rubber balloon may be arranged inside thefixing roller 153 as in Embodiment 1, and a rubber plate may be arrangedto seal the openings of the fixing roller 153 as in Embodiment 2. Thefixing roller of the present Embodiment may be used in the rollernanoimprint apparatus of Embodiment 1, instead of the fixing roller ofEmbodiment 1.

Embodiment 4

FIG. 14 is a perspective view schematically showing a structure of afixing roller of Embodiment 4. FIG. 15 is a cross-sectional viewschematically showing a state where a rubber tube has been wound aroundthe fixing roller of Embodiment 4. A fixing roller 154 of the presentinvention is composed of a pair of circular plates 154 a spaced from oneanother and a rotation shaft 154 b equipped with the plates 154 a. Thefixing roller 154 including a rubber tube 259 wounded between thecircular plates 154 a of the rotation shaft 154 b is arranged inside themold roller 15 tube. Also according to the present Embodiment, the moldroller 15 is supported from the inside when the rubber tube 259 isinflated, and the mold roller 15 can be mounted or demounted when therubber tube 259 is shrunken. Specifically, according to the presentEmbodiment, the fixing roller 154 is a rotor, and the rubber tube 259 isan elastic bag. The fixing roller of the present Embodiment may be usedin the roller nanoimprint apparatus of Embodiment 1, instead of thefixing roller of Embodiment 1.

According to the present Embodiment, a rubber plate, which is an elasticbody, may be attached to the outer circumference surface of the circularplate 154 a of the fixing roller 154. The rubber plate functions as astopper (buffer) for preventing contact between the fixing roller 154and the mold roller 15. Owing to the rubber plate, the contact betweenthe fixing roller 154 and the mold roller 15 can be prevented when thenanostructures are transferred. Asa result, the resin film 31 can show auniform thickness and the fixing roller 154 and the mold roller 15 canbe protected against damages. The rubber plate has a thickness of 0.5mm, for example. The rubber plate may be arranged on the innercircumference surface of the mold roller 15 in the present Embodiment.The elastic body is not especially limited as long as it can reduceimpacts. Springs may be used instead of the rubber plate.

Embodiment 5

FIG. 16 is an explanation view showing the entire configuration of aroller nanoimprint apparatus of Embodiment 5.

According to the present Embodiment, a fixing roller is not mounted, anda mold roller 25 is supported only by first to third pinch rollers 26,27, and 28 arranged rotation-symmetrically (spaced at 120°) with respectto the rotation center of the mold roller 25. By rotating the pinchrollers 26, 27, and 28, the mold roller 25 is rotated and pushes thebase film 12 forward.

The first and third pinch rollers 26 and 27 are the same as thosearranged in the roller nanoimprint apparatus of Embodiment 1. The firstpinch roller 26 is arranged for transferring the nanostructures onto theresin on the base film 12. The third pinch roller 27 is arranged forseparating the resin on the base film 12 from the mold roller 15. Thesecond pinch roller 28 is arranged for stabilize the location of themold roller 25.

In the present Embodiment, it is preferable that the first to thirdpinch rollers 26 to 28 uniformly press the mold roller 25. For example,pressure cylinders of the pinch rollers 26 to 28 have the samestructure, and the rollers 26 to 28 press the roller 25 by the samefluid pressure (by the same system).

According to the present Embodiment, the three pinch rollers 26 to 28are arranged rotation-symmetrically with respect to the rotation centerof the mold roller 25, and the resin is irradiated with UV rays twice,one time between the first and second pinch rollers 26 and 28, the othertime between the second and third pinch rollers 28 and 27. The whitearrow in FIG. 16 shows a direction of the UV irradiation.

The number of the pinch rollers may be four or larger as long as theyare arranged rotation-symmetrically so that the mold roller 25 is noteccentrically supported. When the fixing roller is not arranged and whenthe mold roller 25 is supported by only two pinch rollers as shown inFIG. 1, the mold roller 25 is pushed from the base film 12 toward theupper direction and can not be stably rotated.

When the mold roller is supported by the three or more pinch rollers asin the present Embodiment, the mold roller can be supported without thefixing roller. Thus when the fixing roller is not used, aslide-preventing mechanism is preferably arranged to prevent the moldroller from sliding in the rotation axis direction when thenanostructures are transferred, and for example, a stopper 181 shown inFIG. 17 may be used. If the fixing roller is used, themold roller 25 canbe rotatedby rotating the pinch rollers 26 to 28, and so there is noneed to convey rotation power from the fixing roller to the mold roller25. Thus, it is preferable that the fixing roller is equipped with thebearings, and the fixing roller is mounted on the roller nanoimprintapparatus through the bearings.

Although the roller nanoimprint apparatuses of Embodiments 1 to 5perform a series of processes from feeding of the base film 12 totake-up thereof, the roller nanoimprint apparatus of the presentinvention may be composed of only a mechanical unit for supporting androtating the mold roller, such as the fixing roller and the rubberballoon, and a mechanical unit for embossing such as the pinch rollerand the mold roller.

Comparative Embodiment 1

A roller nanoimprint apparatus of Comparative Embodiment 1 has the sameconfiguration as in Embodiment 1, except for the fixing roller.According to this Comparative Embodiment, a metal roller is insertedinto the same mold roller as in Embodiment 1, and a spacer (wedge) isarranged inside a space between the two rollers, and further the tworollers are attached to each other by curing a resin injected into thespace. The mold roller is mounted on a roller nanoimprint apparatus, anda resin film with moth-eye structures is produced. The thickness of theresulting resin film had 12±1.8 μm. The resin film was attached on aflat surface of a black acrylic plate (refractive index: 1.49) with apaste (refractive index: 1.50). This film was observed by the naked eyefrom various directions under white light. As a result, an interferencecolor resulting from uneven thickness was observed.

The present application claims priority to Patent Application No.2008-046667 filed in Japan on Feb. 27, 2008 under the Paris Conventionand provisions of national law in a designated State, the entirecontents of which are hereby incorporated by reference.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is an explanation view showing the entire configuration of aroller nanoimprint apparatus of Embodiment 1.

FIG. 2 is a cross-sectional view schematically showing surfacestructures of a resin film produced in Embodiment 1.

FIG. 3 is an explanation view showing a change of refractive index of aninterface between the surface structures of a resin shown in FIG. 2 andan air layer.

FIG. 4( a) is a perspective view schematically showing a configurationof the mold roller of Embodiment 1. FIG. 4( b) is a perspective viewschematically showing a configuration of a fixing roller in Embodiment1.

FIG. 5 is a perspective view schematically showing a state where thefixing roller has been arranged inside the mold roller tube inEmbodiment 1.

FIG. 6 is a cross-sectional view schematically showing a state where thefixing roller has been arranged inside the mold roller tube (when themold roller is detached) in Embodiment 1.

FIG. 7 is a cross-sectional view schematically showing a state where thefixing roller has been arranged inside the mold roller tube (when themold roller is fixed) in Embodiment 1.

FIG. 8 is a cross-sectional view schematically showing one example of anembodiment in which a rubber plate is attached to the outercircumference surface of a body of the fixing roller in Embodiment 1.

FIG. 9( a) is a perspective view schematically showing one example of afixing roller including a body having linear projections formed on theouter face thereof. FIG. 9( b) is a perspective view schematicallyshowing one example of a mold roller having linear grooves formed on theinner circumference surface thereof.

FIG. 10 is a perspective view schematically showing one example of afixing roller including bearings attached to a shaft (Embodiment 1).

FIG. 11 is a cross-sectional view schematically showing a state where afixing roller has been arranged inside a mold roller tube (when the moldroller is detached) of Embodiment 2.

FIG. 12 is a cross-sectional view schematically showing a state wherethe fixing roller has been arranged inside the mold roller tube (whenthe mold roller is fixed) of Embodiment 2.

FIG. 13 is a perspective view schematically showing a structure of afixing roller of Embodiment 3.

FIG. 14 is a perspective view schematically showing a structure of afixing roller of Embodiment 4.

FIG. 15 is a cross-sectional view schematically showing a state where arubber tube is wound around the fixing roller of Embodiment 4.

FIG. 16 is an explanation view showing the entire configuration of aroller nanoimprint apparatus of Embodiment 5.

FIG. 17 is a perspective exploded view schematically showing one exampleof an embodiment in which stoppers are arranged on the respective sidesurfaces of a mold roller as an anti-slide mechanism in Embodiment 5.

FIG. 18 is a schematic view showing away of transferring a mold patternfrom a small mold roller to a UV-curable resin on a large mold roller.In FIG. 18, the hatched region shows a region where the pattern isformed.

EXPLANATION OF NUMERALS AND SYMBOLS

-   11: Base film roll-   12: Base film-   13 a, 13 b, 16, 17, 20, 26, 27, 28: Pinch roller-   14: Die coater-   15, 25: Mold roller-   15 c: Linear groove-   18: Lamination film roll-   19: Lamination film-   21: Lamination roll-   31: Resin film-   32: Protrusion-   51: Mold roller (large)-   52: Mold roller (small)-   151, 152, 153, 154: Fixing roller-   151 a, 152 a: Body-   151 b, 152 b: Shaft-   151 c: Linear projection-   151 d: Bearing-   154 a: Circular plate-   154 b: Rotation shaft-   156: Rubber balloon-   157,251: Rubber plate-   181: Stopper-   256, 257: Pressure port-   258: Elastic film-   259: Rubber tube

1-17. (canceled)
 18. A roller nanoimprint apparatus continuouslytransferring nanosized protrusions to a surface of a workpiece film byrotating the mold roller, wherein the roller nanoimprint apparatusfurther includes: a hollow roller having an opening and removablymounted thereon in a region defined by an inner circumference surface ofthe mold roller; and an elastic bag composed of a bag-like elastic filminflatable by fluid injection and arranged inside the hollow roller, themold roller is a cylindrical body having an outer circumference surfacewith nanosized recesses formed thereon, the mold roller is mounted ordemounted when the elastic bag is shrunken, and the mold roller issupported by inflating the elastic bag, thereby bringing a portion ofthe elastic bag, protruded from the opening of the hollow roller by theinflation, into contact with the inner circumference surface of the moldroller, and when thus-supported, the mold roller is rotated by rotatingthe hollow roller.
 19. The roller nanoimprint apparatus according toclaim 18, wherein an elastic body is arranged on a surface of the hollowroller facing the inner circumference surface of the mold roller, exceptfor in the opening.
 20. The roller nanoimprint apparatus according toclaim 18, wherein the mold roller substantially has no seam.
 21. Theroller nanoimprint apparatus according to claim 20, wherein the moldroller is an aluminium tube having the nanosized recesses formed on apolished outer circumference surface thereof by anodization.
 22. Theroller nanoimprint apparatus continuously transferring nanosizedprotrusions to a surface of a workpiece film by rotating a mold roller,wherein the roller nanoimprint apparatus further includes a fluidcontainer removably mounted thereon in a region defined by an innercircumference surface of the mold roller, the fluid container sealing anopening of a hollow roller with an elastic film inflatable by fluidinjection, the mold roller is a cylindrical body having an outercircumference surface with nanosized recesses formed thereon, the moldroller is mounted or demounted when the elastic film is shrunken, themold roller is supported by inflating the elastic film, thereby bringingthe elastic film into contact with the inner circumference surface ofthe mold roller, and when thus-supported, the mold roller is rotated byrotating the hollow roller.
 23. The roller nanoimprint apparatusaccording to claim 22, wherein an elastic body is arranged on a surfaceof the hollow roller facing the inner circumference surface of the moldroller, except for in the opening.
 24. The roller nanoimprint apparatusaccording to claim 22, wherein the mold roller substantially has noseam.
 25. The roller nanoimprint apparatus according to claim 24,wherein the mold roller is an aluminum tube having the nanosizedrecesses formed on a polished outer circumference surface thereof byanodization.
 26. A roller nanoimprint apparatus continuouslytransferring nanosized protrusions to a surface of a workpiece filmsurface by rotating a mold roller, wherein the roller nanoimprintapparatus further includes; a rotor removably mounted thereon, and anelastic bag composed of a bag-like elastic film inflatable by fluidinjection, the mold roller is a cylindrical body having an outercircumference surface with nanosized recesses formed thereon, the rotorand the elastic bag is arranged in a region defined by an innercircumference surface of the mold roller, the elastig bag is mountedaround the rotor, the mold roller is mounted or demounted when theelastic bag is shrunken, the mold roller is supported by inflating theelastic bag, thereby bringing the elastic bag into contact with theinner circumference surface of the mold roller, and when thus-supported,the mold roller is rotated by rotating the rotor.
 27. A rollernanoimprint apparatus according to claim 26, wherein an elastic body isarranged on an outer circumference surface of the rotor in an elasticbag-free region.
 28. A roller nanoimprint apparatus according to claim26, wherein the mold roller substantially has no seam.
 29. A rollernanoimprint apparatus according to claim 28, wherein the mold roller isan aluminium tube having the nanosized recesses formed on a polishedouter circumference surface thereof by anodization.